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  • cobra_ds_2610_3161_e

COBRA DS 2610–3161 B/E/F

Screw

The New Generation of Dry Vacuum Pumps for Demanding Processes

High performance

Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition

Efficient

Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput

Compact

Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Technical specifications

Markets & applications

Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
  • Load lock chambers
  • Organic light-emitting diode (OLED)
  • Physical vapor deposition (PVD)
Lithium ion battery production
  • Degassing
Semiconductor production
  • Medium
  • Harsh
  • Light
Solar power industry
  • Load lock chambers
  • Plasma-enhanced chemical vapor deposition (PECVD)

Accessories

  • Optional powder process version available (only for DS 3010 F and DS 3161 B)
  • Optional tantal coating