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  • COBRA BC 1000 F PREMIUM EFFICIENCY , Screw Vacuum Pump , Busch Vacuum Solutions

COBRA BC 1000 F Premium Efficiency

Dry screw vacuum pump

The Ideal Solution for Light to Medium Semiconductor Applications

High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for tasks in load lock and transfer chambers

Efficient

Latest Busch VacBoost technology, low cost of ownership, minimal maintenance, high uptime, direct water cooling, intelligent idle mode

Compact

Fit-in-place design, directly mounted canned motor

Technical specifications

Markets & applications

Semiconductor production
  • Light