The Ideal Solution for Light to Medium Semiconductor Applications
High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor
Technical specifications
Markets & applications
Semiconductor production
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Medium