Our new gas abatement scrubber systems were a clear highlight of the exhibition floor. We offer a wide range of next generation point-of-use gas abatement systems for the semiconductor and LCD and related industries. The highly efficient exhaust gas abatement technologies provide scrubbing of gases to below threshold limit values (TLV), meeting the requirements of both, existing processes and those in development. Also on display was a COBRA DS dry screw vacuum pump, which can easily be connected to the gas abatement system and features dry compression, a specially developed screw profile, and unimpeded gas discharge.
In addition to being on display at our booth, our products were to be found elsewhere at the trade show. In the center of the exhibition hall, the SEMICON West Smart Manufacturing Pavilion showcased a COBRA BC dry screw vacuum pump, simulating how vacuum functions in a wafer manufacturing chamber, as well as demonstrating processes for clean gas exhaust emissions. Several Busch semiconductor specialists also enjoyed participating in a variety of Fab Owners Association (FOA) sponsored events.
Contact us to find out more about our solutions for the semiconductor industry, or visit our semiconductor solutions page.