Busch Vacuum Pumps and Systems

Semicon Korea - Highly Efficient, Energy-Saving Vacuum Solutions for Fabs

Maulburg, Germany Visitors to our trade show booth at this year’s Semicon Korea had a perfect opportunity to discover more about our range of vacuum pumps for semiconductor fabs and the manufacture of flat panel displays (FPDs) and photovoltaic cells. Semicon Korea was held in early 2017 in the South Korean capital of Seoul.

One highlight at our booth at this year's SEMICON Korea trade show was the COBRA DS range of dry screw vacuum pumps. Visitors expressed great interest in our COBRA DS 2000 G, one of the latest additions to our successful COBRA DS series. These high capacity dry screw vacuum pumps are especially suitable for the most demanding conditions in the manufacture of flat panel displays, photovoltaic cells and for semiconductor applications.

Our COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. This results in a high degree of tolerance to vapor and particles. The screws are manufactured from a single-piece casting, thus avoiding any gaps and making the ingress of process fluids or particles impossible, which prevents corrosion. The COBRA DS 2000 G also features an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures if the process demands it. The backing pump and vacuum booster are combined on a compact base frame.

In addition to the COBRA DS series, visitors had the opportunity to find out more about our Premium Efficiency class of COBRA dry screw vacuum pumps especially for fab applications. The success of the COBRA BC Premium Efficiency class on the market is in no small part due to opportunities to reduce costs, with savings of up to 40% on electrical energy usage, and increased mean-time-between-failure (MTBF) for lower fab operating costs. Furthermore, the small footprints of the COBRA BC Premium Efficiency class of dry screw vacuum pumps allow for pump stacking, which reduces the demand on expensive subfab real estate. Applications in the fab include load-lock chambers in semiconductor processing to prevent contamination, physical vapour deposition (PVD; sputtering or sputter deposition), metrology for quality control and quality assurance of manufacturing processes, and light etching.

Semicon Korea is one of Korea's leading events for the semiconductor industry. Over 450 companies exhibited at this year's event, which was visited by over 40,000 people.

If you did not have a chance to visit us at this year's Semicon Korea, contact us (using the Contact box on the right) to find out more about our range of vacuum solutions for Semicon applications.


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