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  • COBRA DS 5161/9161 A , Screw Vacuum Pump , Busch Vacuum Solutions

COBRA DS 5161/9161 A


The New Generation of Dry Vacuum Pumps for Demanding Processes

High performance

Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition


Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput


Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Technical specifications
Markets & applications
Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
  • Organic light-emitting diode (OLED)
  • Load lock chambers
  • Physical vapor deposition (PVD)
Semiconductor production
  • Harsh
Solar power industry
  • Plasma-enhanced chemical vapor deposition (PECVD)