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  • COBRA DS 1200 A , Screw Vacuum Pump , Busch Vacuum Solutions

COBRA DS 1200 A

Screw

The New Generation of Dry Vacuum Pumps for Demanding Processes

High performance

Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for solar, flat panel and semiconductor applications and harsh processes with high gas temperatures, such as etch and CVD, excellent powder handling, tantal coated screw for harsh applications

Efficient

Low cost of ownership, minimal maintenance, long service intervals, high uptime, high hydrogen throughput, low energy consumption, variable temperature control

Compact

Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame, low vibration level

Technical specifications
Markets & applications
Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
  • Organic light-emitting diode (OLED)
  • Load lock chambers
  • Physical vapor deposition (PVD)
Semiconductor production
  • Harsh
Solar power industry
  • Plasma-enhanced chemical vapor deposition (PECVD)