Successful Presentation of Efficient and Reliable Vacuum Solutions at FPD/Semicon China

Visitors to our trade show booth at this year’s FPD/Semicon China had a perfect opportunity to discover more about our range of vacuum pumps for the manufacture of flat panel displays (FPDs) and photovoltaic cells, as well as for a range of applications in semiconductor fabs. A focus of our presence at FPD China was the COBRA DS and COBRA BC series of dry screw vacuum pumps.

COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. This results in a high degree of tolerance to vapour and particles. The screws are manufactured from a single-piece casting, thus avoiding any gaps and making the ingress of process fluids or particles impossible, which prevents corrosion. The COBRA DS 3010 E also features an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures if the process demands it. The backing pump and vacuum booster are combined on a compact base frame. These high capacity dry screw vacuum pumps are especially suitable for the most demanding conditions in the manufacture of flat panel displays, photovoltaic cells and for semiconductor applications.

In addition to the COBRA DS series, visitors had the opportunity to find out more about our Premium Efficiency class of COBRA dry screw vacuum pumps especially for fab applications. The success of the COBRA BC Premium Efficiency class on the market is in no small part due to opportunities to reduce costs, with savings of up to 40% on electrical energy usage, and increased mean-time-between-failure (MTBF) for lower fab operating costs. Furthermore, the small footprints of the COBRA BC Premium Efficiency class of dry screw vacuum pumps allow for pump stacking, which reduces the demand on expensive subfab real estate. Applications in the fab include load-lock chambers in semiconductor processing to prevent contamination, physical vapour deposition (PVD; sputtering or sputter deposition), metrology for quality control and quality assurance of manufacturing processes, and light etching.

FPD and Semicon China are both major industry trade shows for display and touch-screen technologies and semiconductor applications respectively, bringing together equipment manufacturers from throughout the world to showcase the latest technologies.

If you did not have a chance to visit us at this year's FPD/Semicon China, contact us (using the Contact box on the right) to find out more about our range of vacuum solutions for FPD/Semicon applications.


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