久經考驗的技術,行之有效的設計 — 選擇最佳解決方案

COBRA BC 0601–1200 A/G

螺杆真空泵

High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for cold atomic layer deposition processes, load lock and transfer chambers, metrology, lithography, physical vapor deposition, rapid thermal annealing and etching processes like oxide, silicon and metal
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

技術說明

製圖 COBRA BC 0601–1200 A/G
COBRA BC 0601–1200 A/G
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
技術資料 BC 0601 G BC 1001 G BC 1200 A
額定抽速 550 m³/h 870 m³/h 1200 m³/h
極限壓力 0.003 hPa (mbar) 0.003 hPa (mbar) 0.003 hPa (mbar)
前置真空泵浦馬達額定功率 1.5 kW 1.5 kW 1.5 kW
魯式泵浦馬達額定功率 1.5 kW 2.9 kW 4.0 kW
前级泵电机额定转速 3000 min-1 3000 min-1 3000 min-1
罗茨泵电机额定转速 3000 min-1 5400 min-1 5400 min-1
極限壓力/怠速模式下的功率消耗 1.7 kW 1.7 kW 1.9 kW
噪音(ISO 2151) 62 dB(A) 62 dB(A) 62 dB(A)
用水量 min. 3.0 - 4.0 l/min min. 3.0 - 4.0 l/min min. 4.0 - 5.0 l/min
氮氣消耗 0 - 70 l/min 0 - 70 l/min 0 - 70 l/min
重量(約) 315 kg 310 kg 360 kg
尺寸(長 x 寬 x 高) 905 x 354 x 660 mm 1054 x 425 x 615 mm 1054 x 425 x 615 mm
進氣口/排氣口 DN 63 ISO-K / DN 40 ISO-KF DN 100 ISO-K / DN 40 ISO-KF DN 160 ISO-K / DN 40 ISO-KF
現在下單或需要更多資訊

COBRA BC 0601–1200 A/G

螺杆真空泵

High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for cold atomic layer deposition processes, load lock and transfer chambers, metrology, lithography, physical vapor deposition, rapid thermal annealing and etching processes like oxide, silicon and metal
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

技術說明

製圖
COBRA BC 0601–1200 A/G
COBRA BC 0601–1200 A/G
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
技術資料 BC 0601 G BC 1001 G BC 1200 A
額定抽速 550 m³/h 870 m³/h 1200 m³/h
極限壓力 0.003 hPa (mbar) 0.003 hPa (mbar) 0.003 hPa (mbar)
前置真空泵浦馬達額定功率 1.5 kW 1.5 kW 1.5 kW
魯式泵浦馬達額定功率 1.5 kW 2.9 kW 4.0 kW
前级泵电机额定转速 3000 min-1 3000 min-1 3000 min-1
罗茨泵电机额定转速 3000 min-1 5400 min-1 5400 min-1
極限壓力/怠速模式下的功率消耗 1.7 kW 1.7 kW 1.9 kW
噪音(ISO 2151) 62 dB(A) 62 dB(A) 62 dB(A)
用水量 min. 3.0 - 4.0 l/min min. 3.0 - 4.0 l/min min. 4.0 - 5.0 l/min
氮氣消耗 0 - 70 l/min 0 - 70 l/min 0 - 70 l/min
重量(約) 315 kg 310 kg 360 kg
尺寸(長 x 寬 x 高) 905 x 354 x 660 mm 1054 x 425 x 615 mm 1054 x 425 x 615 mm
進氣口/排氣口 DN 63 ISO-K / DN 40 ISO-KF DN 100 ISO-K / DN 40 ISO-KF DN 160 ISO-K / DN 40 ISO-KF

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