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TURBO TM 1100 - 2200 A

Turbo are the turbomolecular vacuum pumps from Busch. Turbo vacuum pumps have been developed for industrial high vacuum applications and are designed for high vacuum applications up to 1·10-10 hPa (mbar) and high pumping speeds or gas flow rates. The gas is conveyed without any operating fluids. Even the highest loads or any unwanted gas leaks do not affect the high pumping speed of Turbo vacuum pumps. The vacuum pumps can be operated in any mounting position. The compact rotor design is unrivalled in its class and combines the highest pump capacity with the smallest dimensions. Drive unit and control system are completely integrated into the pump housing. Sealing gas and flush connection come as standard. Turbo vacuum pumps are ideal for use in numerous industrial high-vacuum applications, such as:
 

  • Vacuum furnaces
  • Surface treatments
  • Coating units
  • Physical vapour deposition (PVD)
  • Thin film coating

Turbo – for high performance in industrial high vacuum processes.

Turbo – for high performance in industrial high vacuum processes.

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Technical Specifications

Technical Specifications
Turbo turbomolecular vacuum pumps work according to the turbine principle. Rapidly spinning rotor blades rotate between the stator blades. This causes impulses to be sent to the disordered gas particles inside the vacuum pump, which in turn causes a controlled stream of gas to move from the inlet to the outlet of the vacuum pump. To generate this momentum, the rotors reach a peripheral speed of >30.000 min-1. The integrated high-pressure stage permits a higher fore-vacuum and therefore, smaller backing pumps. The permanently lubricated ceramic bearings have a mean time between failures of more than 200.000 hours.
 

Dimensional Drawing TURBO TM 1100 - 2200 A
TURBO TM 1100 - 2200 A
Pumping speed

N2 at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Technical data TURBO TM 1100 A TURBO TM 1600 A TURBO TM 2200 A
Nominal pumping speed for N2 1080 l/s 1600 l/s 2200 l/s
Recommended size of forepump >36 m³/h >40 m³/h >60 m3/h
Ultimate pressure < 1·10-10 hPa (mbar)* < 5·10-8* hPa (mbar) < 1·10-8* hPa (mbar)
Cooling water consumption >200 l/h >200 l/h >200 l/h
Max. foreline pressure for N2 <1 hPa (mbar) <1 hPa (mbar) <0.5 hPa (mbar)
Required ambient temperature 5 - 35 °C 5 - 40 °C 5 - 35 °C
Noise level (ISO 2151) <45 dB(A) <45 dB(A) <60 dB(A)
Max. operating power 400 W 400 W 515 W
Allowed cooling water pressure 3 - 5 bar 3 - 5 bar 3 - 5 bar
Allowed cooling water temperature 10 - 20 °C 10 - 35 °C 10 - 30 °C
Weight approx. 32 kg 37 kg 54 kg
Dimensions (H x Ø) 264 x 385 mm 335 x 335 mm 367 x 335 mm
Connection flange pressure / suction side DN 40 KF / DN 200 ISO-F DN 40 KF / DN 250 ISO-F DN 40 KF / DN 250 ISO-F
* with recommended forepump

Technical Specifications

Technical Specifications
Turbo turbomolecular vacuum pumps work according to the turbine principle. Rapidly spinning rotor blades rotate between the stator blades. This causes impulses to be sent to the disordered gas particles inside the vacuum pump, which in turn causes a controlled stream of gas to move from the inlet to the outlet of the vacuum pump. To generate this momentum, the rotors reach a peripheral speed of >30.000 min-1. The integrated high-pressure stage permits a higher fore-vacuum and therefore, smaller backing pumps. The permanently lubricated ceramic bearings have a mean time between failures of more than 200.000 hours.
 

Dimensional Drawing
TURBO TM 1100 - 2200 A
TURBO TM 1100 - 2200 A
Pumping speed

N2 at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
Technical data TURBO TM 1100 A TURBO TM 1600 A TURBO TM 2200 A
Nominal pumping speed for N2 1080 l/s 1600 l/s 2200 l/s
Recommended size of forepump >36 m³/h >40 m³/h >60 m3/h
Ultimate pressure < 1·10-10 hPa (mbar)* < 5·10-8* hPa (mbar) < 1·10-8* hPa (mbar)
Cooling water consumption >200 l/h >200 l/h >200 l/h
Max. foreline pressure for N2 <1 hPa (mbar) <1 hPa (mbar) <0.5 hPa (mbar)
Required ambient temperature 5 - 35 °C 5 - 40 °C 5 - 35 °C
Noise level (ISO 2151) <45 dB(A) <45 dB(A) <60 dB(A)
Max. operating power 400 W 400 W 515 W
Allowed cooling water pressure 3 - 5 bar 3 - 5 bar 3 - 5 bar
Allowed cooling water temperature 10 - 20 °C 10 - 35 °C 10 - 30 °C
Weight approx. 32 kg 37 kg 54 kg
Dimensions (H x Ø) 264 x 385 mm 335 x 335 mm 367 x 335 mm
Connection flange pressure / suction side DN 40 KF / DN 200 ISO-F DN 40 KF / DN 250 ISO-F DN 40 KF / DN 250 ISO-F
* with recommended forepump

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TURBO TM 1100 - 2200 A

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