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COBRA BC 0600 F

  • Efficient:
    Cost-effective, long uptime, energy-efficient  
  • Easy servicing:
    Long service intervals  
  • Reliable:
    Operationally reliable  
  • Flexible:
    Application-oriented  
  • Quiet:
    Noise level < 62 dB(A)
     

The COBRA BC 0600 F is a proven dry screw vacuum pump within the COBRA BC series portfolio. It offers best-in-class pumping speeds for the most demanding solar, flat panel and semiconductor applications.

The COBRA BC series offers excellent powder and particulate handling capabilities due to its unique screw design. The proven design combines backing pump and vacuum booster in one compact frame.

COBRA series vacuum pumps offer reduced ownership costs. High-efficiency motors and an idle mode feature increase the energy efficiency. Additional savings are realized through increased uptime and a reduced footprint, making retrofitting easier in many instances.

Applications

  • Load lock (conditional)
  • Transfer
  • Metrology
  • Lithography
  • Physical Vapor Deposition (PVD)
  • Rapid Thermal Annealing (RTA)
  • Strip/Ashing
  • Oxide Etch
  • Silicon Etch
  • Metal Etch

COBRA – the next level of compact light to harsh duty vacuum pumps.

COBRA – the next level of compact light to harsh duty vacuum pumps.

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Contact us directly (Busch Turkey):
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Technical Specifications

Technical specifications
The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities.

The advanced screw design results in lower electric energy consumption compared to standard screw designs. It also results in a lower heat load of the compressed gas. BC series pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket.

The unique “flying bearing” screw design eliminates inlet bearing issues and allows a reduced footprint.

The COBRA BC 0600 F vacuum pump uses a high performance vacuum booster to optimize the system performance.

Dimensional Drawing
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Technical data COBRA BC 0600 F
Nominal pumping speed 520 m³/h
Nominal motor rating backing pump 1.5 kW
Nominal motor rating vacuum booster 4.0 kW
Nominal motor speed backing pump 3000 min-1
Nominal motor speed vacuum booster 3000 min-1
Ultimate pressure 0.003 hPa (mbar)
Power consumption at ultimate pressure / Idle mode 2.1 / 1.1 kW
Noise level (ISO 2151) 62 dB(A)
Water consumption 3.0 l/min
Nitrogen consumption 0-50 l/min
Weight approx. 315 kg
Dimensions (L x W x H) 933 x 354 x 694 mm
Gas inlet / outlet DN 63 ISO-K / DN 40 ISO-KF

Technical Specifications

Technical specifications
The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities.

The advanced screw design results in lower electric energy consumption compared to standard screw designs. It also results in a lower heat load of the compressed gas. BC series pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket.

The unique “flying bearing” screw design eliminates inlet bearing issues and allows a reduced footprint.

The COBRA BC 0600 F vacuum pump uses a high performance vacuum booster to optimize the system performance.

Dimensional Drawing
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
Technical data COBRA BC 0600 F
Nominal pumping speed 520 m³/h
Nominal motor rating backing pump 1.5 kW
Nominal motor rating vacuum booster 4.0 kW
Nominal motor speed backing pump 3000 min-1
Nominal motor speed vacuum booster 3000 min-1
Ultimate pressure 0.003 hPa (mbar)
Power consumption at ultimate pressure / Idle mode 2.1 / 1.1 kW
Noise level (ISO 2151) 62 dB(A)
Water consumption 3.0 l/min
Nitrogen consumption 0-50 l/min
Weight approx. 315 kg
Dimensions (L x W x H) 933 x 354 x 694 mm
Gas inlet / outlet DN 63 ISO-K / DN 40 ISO-KF

Downloads

COBRA BC 0600 F

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