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  • Busch Vacuum Solutions, COBRA DS 2141 A, Vacuum boosters


Dry screw vacuum pump

The New Generation of Dry Vacuum Pumps for Demanding Processes

High performance

Advanced screw design, excellent running qualities, integrated vacuum booster, excellent powder handling capabilities, perfectly suited for semiconductor applications, flat panel display production and solar power applications


Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput, variable temperature control, low vibration level


Fit-in-place design, directly mounted canned motor, integrated control panel, backing pump and vacuum booster combined on a compact base frame

Technical specifications

Markets & applications

Biogas handling
  • Upgrading - pressure swing adsorption
Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
  • Load lock chambers
  • Organic light-emitting diode (OLED)
  • Physical vapor deposition (PVD)
Semiconductor production
  • Medium
  • Harsh
  • Light
Solar power industry
  • Physical vapor deposition (PVD)
  • Lamination
  • Ingot casting
  • Load lock chambers
  • Plasma-enhanced chemical vapor deposition (PECVD)