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COBRA BC 1200 A

Pompă de vid elicoidală cu funcţionare fără lubrifiant

High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for cold atomic layer deposition processes, load lock and transfer chambers, metrology, lithography, physical vapor deposition, rapid thermal annealing and etching processes like oxide, silicon and metal
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Specificaţii tehnice

Desen COBRA BC 1200 A
COBRA BC 1200 A
Pumping speed 50 Hz 60 Hz
Pumping speed
Technical data COBRA BC 1200 A
Скорость откачки 1200 m³/h
Presiune finală 0,003 hPa (mbar)
Nominal motor rating backing pump 1,5 kW
Nominal motor rating vacuum booster 4,0 kW
Nominal motor speed backing pump 3000 min-1
Nominal motor speed vacuum booster 5400 min-1
Power consumption at ultimate pressure / Idle mode 1,9 / 1,3 kW
Nivel de zgomot (ISO 2151) 62 dB(A)
Consum de apă min, 4,0–5,0 l/min
Nitrogen consumption 0–70 l/min
Greutate aprox. 360 kg
Dimensiuni (L x W x H) 1054 x 425 x 615 mm
Admisie/evacuare gaz DN 160 ISO-K / DN 40 ISO-KF
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COBRA BC 1200 A

Pompă de vid elicoidală cu funcţionare fără lubrifiant

High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for cold atomic layer deposition processes, load lock and transfer chambers, metrology, lithography, physical vapor deposition, rapid thermal annealing and etching processes like oxide, silicon and metal
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Specificaţii tehnice

Desen
COBRA BC 1200 A
COBRA BC 1200 A
Pumping speed
50 Hz
60 Hz
Pumping speed
Technical data COBRA BC 1200 A
Скорость откачки 1200 m³/h
Presiune finală 0,003 hPa (mbar)
Nominal motor rating backing pump 1,5 kW
Nominal motor rating vacuum booster 4,0 kW
Nominal motor speed backing pump 3000 min-1
Nominal motor speed vacuum booster 5400 min-1
Power consumption at ultimate pressure / Idle mode 1,9 / 1,3 kW
Nivel de zgomot (ISO 2151) 62 dB(A)
Consum de apă min, 4,0–5,0 l/min
Nitrogen consumption 0–70 l/min
Greutate aprox. 360 kg
Dimensiuni (L x W x H) 1054 x 425 x 615 mm
Admisie/evacuare gaz DN 160 ISO-K / DN 40 ISO-KF

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