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COBRA BC 0600 F

  • Efficient:
    Cost-effective, long uptime, energy-efficient  
  • Easy servicing:
    Long service intervals  
  • Reliable:
    Operationally reliable  
  • Flexible:
    Application-oriented  
  • Quiet:
    Noise level < 62 dB(A)
     

The COBRA BC 0600 F is a proven dry screw vacuum pump within the COBRA BC series portfolio. It offers best-in-class pumping speeds for the most demanding solar, flat panel and semiconductor applications.

The COBRA BC series offers excellent powder and particulate handling capabilities due to its unique screw design. The proven design combines backing pump and vacuum booster in one compact frame.

COBRA series vacuum pumps offer reduced ownership costs. High-efficiency motors and an idle mode feature increase the energy efficiency. Additional savings are realized through increased uptime and a reduced footprint, making retrofitting easier in many instances.

Applications

  • Load lock (conditional)
  • Transfer
  • Metrology
  • Lithography
  • Physical Vapor Deposition (PVD)
  • Rapid Thermal Annealing (RTA)
  • Strip/Ashing
  • Oxide Etch
  • Silicon Etch
  • Metal Etch

COBRA – the next level of compact light to harsh duty vacuum pumps.

COBRA – the next level of compact light to harsh duty vacuum pumps.

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Specificaţii tehnice

Technical specifications
The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities.

The advanced screw design results in lower electric energy consumption compared to standard screw designs. It also results in a lower heat load of the compressed gas. BC series pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket.

The unique “flying bearing” screw design eliminates inlet bearing issues and allows a reduced footprint.

The COBRA BC 0600 F vacuum pump uses a high performance vacuum booster to optimize the system performance.

Desen
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Technical data COBRA BC 0600 F
Viteză nominală de pompare 520 m³/h
Presiune finală 0,003 hPa (mbar)
Nominal motor rating backing pump 1,5 kW
Nominal motor rating vacuum booster 4,0 kW
Nominal motor speed backing pump 3000 min-1
Nominal motor speed vacuum booster 3000 min-1
Power consumption at ultimate pressure / Idle mode 2,1 / 1,1 kW
Nivel de zgomot (ISO 2151) 62 dB(A)
Consum de apă 3,0 l/min
Nitrogen consumption 0-50 l/min
Greutate aprox. 315 kg
Dimensiuni (L x W x H) 933 x 354 x 694 mm
Admisie/evacuare gaz DN 63 ISO-K / DN 40 ISO-KF

Specificaţii tehnice

Technical specifications
The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities.

The advanced screw design results in lower electric energy consumption compared to standard screw designs. It also results in a lower heat load of the compressed gas. BC series pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket.

The unique “flying bearing” screw design eliminates inlet bearing issues and allows a reduced footprint.

The COBRA BC 0600 F vacuum pump uses a high performance vacuum booster to optimize the system performance.

Desen
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
Technical data COBRA BC 0600 F
Viteză nominală de pompare 520 m³/h
Presiune finală 0,003 hPa (mbar)
Nominal motor rating backing pump 1,5 kW
Nominal motor rating vacuum booster 4,0 kW
Nominal motor speed backing pump 3000 min-1
Nominal motor speed vacuum booster 3000 min-1
Power consumption at ultimate pressure / Idle mode 2,1 / 1,1 kW
Nivel de zgomot (ISO 2151) 62 dB(A)
Consum de apă 3,0 l/min
Nitrogen consumption 0-50 l/min
Greutate aprox. 315 kg
Dimensiuni (L x W x H) 933 x 354 x 694 mm
Admisie/evacuare gaz DN 63 ISO-K / DN 40 ISO-KF

Descărcări

COBRA BC 0600 F

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