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COBRA BC 0600 F

  • Efficient:
    Cost-effective, long uptime, energy-efficient  
  • Easy servicing:
    Long service intervals  
  • Reliable:
    Operationally reliable  
  • Flexible:
    Application-oriented  
  • Quiet:
    Noise level < 62 dB(A)
     

The COBRA BC 0600 F is a proven dry screw vacuum pump within the COBRA BC series portfolio. It offers best-in-class pumping speeds for the most demanding solar, flat panel and semiconductor applications.

The COBRA BC series offers excellent powder and particulate handling capabilities due to its unique screw design. The proven design combines backing pump and vacuum booster in one compact frame.

COBRA series vacuum pumps offer reduced ownership costs. High-efficiency motors and an idle mode feature increase the energy efficiency. Additional savings are realized through increased uptime and a reduced footprint, making retrofitting easier in many instances.

Applications

  • Load lock (conditional)
  • Transfer
  • Metrology
  • Lithography
  • Physical Vapor Deposition (PVD)
  • Rapid Thermal Annealing (RTA)
  • Strip/Ashing
  • Oxide Etch
  • Silicon Etch
  • Metal Etch

COBRA – the next level of compact light to harsh duty vacuum pumps.

COBRA – the next level of compact light to harsh duty vacuum pumps.

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Dane techniczne

Technical specifications
The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities.

The advanced screw design results in lower electric energy consumption compared to standard screw designs. It also results in a lower heat load of the compressed gas. BC series pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket.

The unique “flying bearing” screw design eliminates inlet bearing issues and allows a reduced footprint.

The COBRA BC 0600 F vacuum pump uses a high performance vacuum booster to optimize the system performance.

Rysunku
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Dane techniczne COBRA BC 0600 F
Wydajność nominalna 520 m³/h
Ciśnienie końcowe 0,003 hPa (mbar)
Nominalna moc silnika pompy wstępnej 1,5 kW
Nominalna moc silnika wspomagania próżniowego 4,0 kW
Nominal motor speed backing pump 3000 min-1
Nominal motor speed vacuum booster 3000 min-1
Pobór mocy przy ciśnieniu końcowym / trybie bezczynności 2,1 / 1,1 kW
Poziom hałasu (ISO 2151) 62 dB(A)
Konsumpcja wody 3,0 l/min
Zużycie azotu 0-50 l/min
Waga (w przybliżeniu) 315 kg
Wymiary (L × W × H) 933 x 354 x 694 mm
Wlot/wylot gazu DN 63 ISO-K / DN 40 ISO-KF

Dane techniczne

Technical specifications
The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities.

The advanced screw design results in lower electric energy consumption compared to standard screw designs. It also results in a lower heat load of the compressed gas. BC series pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket.

The unique “flying bearing” screw design eliminates inlet bearing issues and allows a reduced footprint.

The COBRA BC 0600 F vacuum pump uses a high performance vacuum booster to optimize the system performance.

Rysunku
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
Dane techniczne COBRA BC 0600 F
Wydajność nominalna 520 m³/h
Ciśnienie końcowe 0,003 hPa (mbar)
Nominalna moc silnika pompy wstępnej 1,5 kW
Nominalna moc silnika wspomagania próżniowego 4,0 kW
Nominal motor speed backing pump 3000 min-1
Nominal motor speed vacuum booster 3000 min-1
Pobór mocy przy ciśnieniu końcowym / trybie bezczynności 2,1 / 1,1 kW
Poziom hałasu (ISO 2151) 62 dB(A)
Konsumpcja wody 3,0 l/min
Zużycie azotu 0-50 l/min
Waga (w przybliżeniu) 315 kg
Wymiary (L × W × H) 933 x 354 x 694 mm
Wlot/wylot gazu DN 63 ISO-K / DN 40 ISO-KF

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COBRA BC 0600 F

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