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COBRA DS 0600 E

  • Advanced Screw Design
  • Efficient:
    low operating costs, minimal maintenance, high uptime
  • Flexible:
    application-oriented
  • Short Process Times:
    due to high pumping speeds
  • Compact Design
     

COBRA DS 0600 E is a dry screw vacuum pump in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat panels and semiconductors. State-of-theart COBRA DS screw vacuum technology allows powder- and particle-laden media to be evacuated.

COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.

Equipped with a high-efficiency motor, the COBRA DS 0600 E offers excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-ofownership is very low, setting the standard in this performance class.

Retrofitting this screw vacuum pump to existing systems can be performed quickly and easily due to a fit-in-place design.

Applications

  • High-density plasma CVD (HDP-CVD)
  • Rapid thermal processing (RTP)
  • Sub-atmospheric CVD (SACVD)
  • Metal-organic CVD (MOCVD)
  • Plasma-enhanced CVD (PECVD)
  • Low-pressure CVD (LPCVD)
  • Atomic layer deposition (ALD)
  • High-capacity load lock

COBRA – the new generation of dry vacuum pumps for demanding processes.

COBRA – the new generation of dry vacuum pumps for demanding processes.

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Especificaciones técnicas

Technical specifications
Two screw rotors inside the cylinder of the COBRA DS rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen. Tantal coating is available for harsh applications.

Dibujo COBRA DS 0600 E
COBRA DS 0600 E
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Características técnicas COBRA DS 0600 E
Caudal nominal 600 m³/h
Vacío Límite 0,01 (1·10-2) hPa (mbar)
Potencia nominal del motor 15 kW
Velocidad nominal del motor 3600 min-1
Consumo energético a presión final 9 kW
Nivel sonoro (ISO 2151) < 70 min-1
Consumo de agua min, 6 l/min
Consumo de nitrógeno 0 - 200 l/min
Peso aproximado 745 kg
Dimensiones (L x W x H) 1654 x 600 x 747 mm
Entrada / salida de gas DN 100 / DN 63

Especificaciones técnicas

Technical specifications
Two screw rotors inside the cylinder of the COBRA DS rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen. Tantal coating is available for harsh applications.

Dibujo
COBRA DS 0600 E
COBRA DS 0600 E
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
Características técnicas COBRA DS 0600 E
Caudal nominal 600 m³/h
Vacío Límite 0,01 (1·10-2) hPa (mbar)
Potencia nominal del motor 15 kW
Velocidad nominal del motor 3600 min-1
Consumo energético a presión final 9 kW
Nivel sonoro (ISO 2151) < 70 min-1
Consumo de agua min, 6 l/min
Consumo de nitrógeno 0 - 200 l/min
Peso aproximado 745 kg
Dimensiones (L x W x H) 1654 x 600 x 747 mm
Entrada / salida de gas DN 100 / DN 63

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COBRA DS 0600 E

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