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TORRI BD 0100–0600 A

Multi-Stage Rotary Lobe Vacuum Pump

Flexible
Shortest pump-down time for load lock chambers
Efficient
Extremely low energy consumption, minimal maintenance, high uptime
Compact
Exceptionally small and light-weight

Technical Specifications

Dimensional drawing TORRI BD 0100–0600 A
TORRI BD 0100–0600 A
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Technical data BD 0100 A BD 0300 A BD 0600 A
Nominal pumping speed 100 m³/h 300 m³/h 600 m³/h
Ultimate pressure 0.01 hPa (mbar) 0.001 hPa (mbar) 0.001 hPa (mbar)
Nominal motor rating backing pump 2.2 kW 2.2 kW 2.2 kW
Nominal motor rating vacuum booster - 2.2 kW 2.2 kW
Nominal motor speed backing pump 5500 min-1 5500 min-1 5500 min-1
Nominal motor speed vacuum booster - 3500 min-1 7000 min-1
Power consumption at ultimate pressure 0.4 kW 0.5 kW 0.6 kW
Noise level (ISO 2151) < 60 dB(A) < 60 dB(A) < 60 dB(A)
Water consumption min. 1.0 l/min min. 2.0 l/min min. 2.0 l/min
Weight approx. 60 kg 120 kg 120 kg
Dimensions (L x W x H) 450 x 230 x 275 mm 530 x 230 x 520 mm 530 x 230 x 520 mm
Gas inlet / outlet DN 50 KF / DN 25 KF DN 80 KF / DN 25 KF DN 80 KF / DN 25 KF
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TORRI BD 0100–0600 A

Multi-Stage Rotary Lobe Vacuum Pump

Flexible
Shortest pump-down time for load lock chambers
Efficient
Extremely low energy consumption, minimal maintenance, high uptime
Compact
Exceptionally small and light-weight

Technical Specifications

Dimensional drawing
TORRI BD 0100–0600 A
TORRI BD 0100–0600 A
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
Technical data BD 0100 A BD 0300 A BD 0600 A
Nominal pumping speed 100 m³/h 300 m³/h 600 m³/h
Ultimate pressure 0.01 hPa (mbar) 0.001 hPa (mbar) 0.001 hPa (mbar)
Nominal motor rating backing pump 2.2 kW 2.2 kW 2.2 kW
Nominal motor rating vacuum booster - 2.2 kW 2.2 kW
Nominal motor speed backing pump 5500 min-1 5500 min-1 5500 min-1
Nominal motor speed vacuum booster - 3500 min-1 7000 min-1
Power consumption at ultimate pressure 0.4 kW 0.5 kW 0.6 kW
Noise level (ISO 2151) < 60 dB(A) < 60 dB(A) < 60 dB(A)
Water consumption min. 1.0 l/min min. 2.0 l/min min. 2.0 l/min
Weight approx. 60 kg 120 kg 120 kg
Dimensions (L x W x H) 450 x 230 x 275 mm 530 x 230 x 520 mm 530 x 230 x 520 mm
Gas inlet / outlet DN 50 KF / DN 25 KF DN 80 KF / DN 25 KF DN 80 KF / DN 25 KF

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