• Advanced Screw Design
• Efficient:
  low operating costs, minimal maintenance, high uptime
• Flexible:
  application-oriented
• Short Process Times:
  due to high pumping speeds
• Compact Design
   

COBRA DS 0600 E is a dry screw vacuum pump in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat panels and semiconductors. State-of-theart COBRA DS screw vacuum technology allows powder- and particle-laden media to be evacuated.

COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.

Equipped with a high-efficiency motor, the COBRA DS 0600 E offers excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-ofownership is very low, setting the standard in this performance class.

Retrofitting this screw vacuum pump to existing systems can be performed quickly and easily due to a fit-in-place design.

Applications

• High-density plasma CVD (HDP-CVD)
• Rapid thermal processing (RTP)
• Sub-atmospheric CVD (SACVD)
• Metal-organic CVD (MOCVD)
• Plasma-enhanced CVD (PECVD)
• Low-pressure CVD (LPCVD)
• Atomic layer deposition (ALD)
• High-capacity load lock