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COBRA BC 0601–1200 A/G

Dry Screw Vacuum Pump

High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for cold atomic layer deposition processes, load lock and transfer chambers, metrology, lithography, physical vapor deposition, rapid thermal annealing and etching processes like oxide, silicon and metal
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Technical Specifications

Dimensional drawing COBRA BC 0601–1200 A/G
COBRA BC 0601–1200 A/G
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Technical data BC 0601 G BC 1001 G BC 1200 A
Nominal pumping speed 550 m³/h 870 m³/h 1200 m³/h
Ultimate pressure 0.003 hPa (mbar) 0.003 hPa (mbar) 0.003 hPa (mbar)
Nominal motor rating backing pump 1.5 kW 1.5 kW 1.5 kW
Nominal motor rating vacuum booster 1.5 kW 2.9 kW 4.0 kW
Nominal motor speed backing pump 3000 min-1 3000 min-1 3000 min-1
Nominal motor speed vacuum booster 3000 min-1 5400 min-1 5400 min-1
Power consumption at ultimate pressure / Idle mode 1.7 kW 1.7 kW 1.9 kW
Noise level (ISO 2151) 62 dB(A) 62 dB(A) 62 dB(A)
Water consumption min. 3.0 - 4.0 l/min min. 3.0 - 4.0 l/min min. 4.0 - 5.0 l/min
Nitrogen consumption 0 - 70 l/min 0 - 70 l/min 0 - 70 l/min
Weight approx. 315 kg 310 kg 360 kg
Dimensions (L x W x H) 905 x 354 x 660 mm 1054 x 425 x 615 mm 1054 x 425 x 615 mm
Gas inlet / outlet DN 63 ISO-K / DN 40 ISO-KF DN 100 ISO-K / DN 40 ISO-KF DN 160 ISO-K / DN 40 ISO-KF
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COBRA BC 0601–1200 A/G

Dry Screw Vacuum Pump

High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for cold atomic layer deposition processes, load lock and transfer chambers, metrology, lithography, physical vapor deposition, rapid thermal annealing and etching processes like oxide, silicon and metal
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Technical Specifications

Dimensional drawing
COBRA BC 0601–1200 A/G
COBRA BC 0601–1200 A/G
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
Technical data BC 0601 G BC 1001 G BC 1200 A
Nominal pumping speed 550 m³/h 870 m³/h 1200 m³/h
Ultimate pressure 0.003 hPa (mbar) 0.003 hPa (mbar) 0.003 hPa (mbar)
Nominal motor rating backing pump 1.5 kW 1.5 kW 1.5 kW
Nominal motor rating vacuum booster 1.5 kW 2.9 kW 4.0 kW
Nominal motor speed backing pump 3000 min-1 3000 min-1 3000 min-1
Nominal motor speed vacuum booster 3000 min-1 5400 min-1 5400 min-1
Power consumption at ultimate pressure / Idle mode 1.7 kW 1.7 kW 1.9 kW
Noise level (ISO 2151) 62 dB(A) 62 dB(A) 62 dB(A)
Water consumption min. 3.0 - 4.0 l/min min. 3.0 - 4.0 l/min min. 4.0 - 5.0 l/min
Nitrogen consumption 0 - 70 l/min 0 - 70 l/min 0 - 70 l/min
Weight approx. 315 kg 310 kg 360 kg
Dimensions (L x W x H) 905 x 354 x 660 mm 1054 x 425 x 615 mm 1054 x 425 x 615 mm
Gas inlet / outlet DN 63 ISO-K / DN 40 ISO-KF DN 100 ISO-K / DN 40 ISO-KF DN 160 ISO-K / DN 40 ISO-KF

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