COBRA BC – The Ideal Solution for Light to Medium Semiconductor Applications
COBRA BC vacuum pumps are perfectly suited for tasks in load lock and transfer chambers. Further applications are among others metrology, lithography, physical vapor deposition (PVD), rapid thermal annealing (RTA) and silicon etch.
Their state-of-the-art screw vacuum pump technology and specially developed screw profile set new standards of efficiency. The patented self-balancing screw design and screw rotor ensure excellent running qualities and high uptime.
Due to the bell-shaped cantilever construction, the twin rotor with variable pitch screws is mounted only on the motor side. The unique “flying bearing” design makes inlet bearings unnecessary. This ensures clean vacuum generation and allows the full recovery of pumped gases.
A directly mounted, canned motor makes the dimensions of the COBRA BC series very compact.
The fully open communication protocol (Modbus TCP-IP) allows you to control all functionalities, including idle modes and variable speed drive. It can easily be adapted to a specific network protocol using standard interface components.
COBRA BC series vacuum pumps are available in a “Premium Efficiency” version. It is equipped with the latest Busch VacBoost technology. Energy savings of up to 40% are possible compared to conventional vacuum generators.
Your benefits at a glance:
- Advanced screw design
- Dry and contact-free operating principle
- Unique flying bearing design
- Cantilever construction
- Compact fit-in-place design
- Minimal maintenance
- Minimized operating costs
- Fully open communication protocol