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COBRA BC 0600 F

  • Efficient:
    Cost-effective, long uptime, energy-efficient  
  • Easy servicing:
    Long service intervals  
  • Reliable:
    Operationally reliable  
  • Flexible:
    Application-oriented  
  • Quiet:
    Noise level < 62 dB(A)
     

The COBRA BC 0600 F is a proven dry screw vacuum pump within the COBRA BC series portfolio. It offers best-in-class pumping speeds for the most demanding solar, flat panel and semiconductor applications.

The COBRA BC series offers excellent powder and particulate handling capabilities due to its unique screw design. The proven design combines backing pump and vacuum booster in one compact frame.

COBRA series vacuum pumps offer reduced ownership costs. High-efficiency motors and an idle mode feature increase the energy efficiency. Additional savings are realized through increased uptime and a reduced footprint, making retrofitting easier in many instances.

Applications

  • Load lock (conditional)
  • Transfer
  • Metrology
  • Lithography
  • Physical Vapor Deposition (PVD)
  • Rapid Thermal Annealing (RTA)
  • Strip/Ashing
  • Oxide Etch
  • Silicon Etch
  • Metal Etch

COBRA – the next level of compact light to harsh duty vacuum pumps.

Want to know more?
Contact us directly (Busch United States):
+1 757 463 7800 Get in contact

Technical specifications
The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities.

The advanced screw design results in lower electric energy consumption compared to standard screw designs. It also results in a lower heat load of the compressed gas. BC series pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket.

The unique “flying bearing” screw design eliminates inlet bearing issues and allows a reduced footprint.

The COBRA BC 0600 F vacuum pump uses a high performance vacuum booster to optimize the system performance.


Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Technical data COBRA BC 0600 F
Nominal pumping speed m³/h 50 Hz 520
Nominal motor rating backing pump kW 50 Hz 1.5
Nominal motor rating vacuum booster kW 50 Hz 4.0
Nominal motor speed backing pump min-1 50 Hz 3000
Nominal motor speed vacuum booster min-1 50 Hz 3000
Ultimate pressure hPa (mbar) 0.003
Power consumption at ultimate pressure / Idle mode kW 50 Hz 2.1 / 1.1
Noise level (ISO 2151) dB(A) 50 Hz 62
Water consumption l / min 3.0
Nitrogen consumption l / min 0-50
Weight approx. kg 315
Dimensions (L x W x H) mm 933 x 354 x 694
Gas inlet / outlet DN 63 ISO-K / DN 40 ISO-KF

Downloads

COBRA BC 0600 F

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