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COBRA DS 5161-9161 A/B/F

Dry Screw Vacuum Pumps

High performance
Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput
Compact
Fit-in-place design, directly mounted canned motor

Technical Specifications

Dimensional drawing COBRA DS 5161-9161 A/B/F
COBRA DS 5161-9161 A/B/F
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Technical data DS 5161 A DS 8161 F DS 9161 B
Nominal pumping speed 4300 m³/h 6000 m³/h 6160 m³/h
Ultimate pressure 0.001 (1·10-3) hPa (mbar) 0.001 hPa (mbar) 0.001 (1·10-3) hPa (mbar)
Nominal motor rating vacuum booster 15 kW 20 kW 20 kW
Nominal motor rating backing pump 15 kW 15 kW 15 kW
Power consumption at ultimate pressure / Idle mode 12.5 kW 13 min-1 13 kW
Nominal motor speed backing pump 3600 min-1 3600 kW 3600 min-1
Nominal motor speed vacuum booster 3600 min-1 5400 min-1 3600 min-1
Noise level (ISO 2151) < 75 dB(A) < 75 dB(A) < 75 dB(A)
Water consumption min. 10 l/min min. 13 l/min min. 11 l/min
Nitrogen consumption 0 – 200 l/min 0 - 200 l/min 0 – 200 l/min
Weight approx. 1440 kg 1350 kg 1800 kg
Dimensions (L x W x H) 1550 x 723 x 1504 mm 1441 x 627 x 1100 mm 1572 x 810 x 1860 mm
Gas inlet / outlet DN 250 / DN 63 DN 200 / DN 63 DN 200 / DN 63
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COBRA DS 5161-9161 A/B/F

Dry Screw Vacuum Pumps

High performance
Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput
Compact
Fit-in-place design, directly mounted canned motor

Technical Specifications

Dimensional drawing
COBRA DS 5161-9161 A/B/F
COBRA DS 5161-9161 A/B/F
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
Technical data DS 5161 A DS 8161 F DS 9161 B
Nominal pumping speed 4300 m³/h 6000 m³/h 6160 m³/h
Ultimate pressure 0.001 (1·10-3) hPa (mbar) 0.001 hPa (mbar) 0.001 (1·10-3) hPa (mbar)
Nominal motor rating vacuum booster 15 kW 20 kW 20 kW
Nominal motor rating backing pump 15 kW 15 kW 15 kW
Power consumption at ultimate pressure / Idle mode 12.5 kW 13 min-1 13 kW
Nominal motor speed backing pump 3600 min-1 3600 kW 3600 min-1
Nominal motor speed vacuum booster 3600 min-1 5400 min-1 3600 min-1
Noise level (ISO 2151) < 75 dB(A) < 75 dB(A) < 75 dB(A)
Water consumption min. 10 l/min min. 13 l/min min. 11 l/min
Nitrogen consumption 0 – 200 l/min 0 - 200 l/min 0 – 200 l/min
Weight approx. 1440 kg 1350 kg 1800 kg
Dimensions (L x W x H) 1550 x 723 x 1504 mm 1441 x 627 x 1100 mm 1572 x 810 x 1860 mm
Gas inlet / outlet DN 250 / DN 63 DN 200 / DN 63 DN 200 / DN 63

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