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COBRA DS 5161 / 9161 A

  • Advanced Screw Design
  • Efficient:
    low operating costs, minimal maintenance, high uptime
  • Flexible:
    application-oriented
  • Short Process Times:
    due to high pumping speeds
  • Compact Design
     

COBRA DS 5161/9161 A are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat panels and semiconductors. State-of- the-art COBRA DS screw vacuum technology allows powder- and particle-laden media to be evacuated.

COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.

The COBRA DS 5161/9161 A feature an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures. The backing pump and vacuum booster are combined on a compact base frame.

Equipped with a high-efficiency motor, the COBRA DS 5161/9161 A offer excellent energy efficiency potential. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.

Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.

Applications

  • High-density plasma CVD (HDP-CVD)
  • Rapid thermal processing (RTP)
  • Sub-atmospheric CVD (SACVD)
  • Metal-organic CVD (MOCVD)
  • Plasma-enhanced CVD (PECVD)
  • Low-pressure CVD (LPCVD)
  • Atomic layer deposition (ALD)

COBRA – the new generation of dry vacuum pumps for demanding processes.

COBRA – the new generation of dry vacuum pumps for demanding processes.

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Technická data

Technical specifications
COBRA DS 5161/9161 A are screw vacuum pumps combined with one vacuum booster. Two screw rotors inside the cylinder of the screw vacuum pump rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen. The COBRA DS 5161/9161 A use a high-performance vacuum booster to optimize the system performance.

Kresba COBRA DS 5161/9161 A
COBRA DS 5161/9161 A
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Technická data COBRA DS 5161 A COBRA DS 9161 A
Jmenovitá čerpací rychlost 4300 m³/h 6160 m³/h
Koncový tlak 0,001 (1·10-3) hPa (mbar) 0,001 (1·10-3) hPa (mbar)
Jmenovitý výkon motoru vakuového posilovače 15 kW 20 kW
Jmenovitý výkon motoru základové pumpy 15 kW 15 kW
Spotřeba energie při koncovém tlaku / chod naprázdno 12,5 kW 13 kW
Jmenovité otáčky motoru základové pumpy 3600 min-1 3600 min-1
Jmenovité otáčky motoru vakuového posilovače 3600 min-1 3600 min-1
Hladina hluku (ISO 2151) < 75 dB(A) < 75 dB(A)
Spotřeba vody min, 10 l/min min, 11 l/min
Spotřeba dusíku 0 – 200 l/min 0 – 200 l/min
Přibližná hmotnost 1440 kg 1800 kg
Rozměry (L x W x H) 1550 x 723 x 1504 mm 1572 x 810 x 1860 mm
Přívod / výstup plynu DN 250 / DN 63 DN 200 / DN 63

Technická data

Technical specifications
COBRA DS 5161/9161 A are screw vacuum pumps combined with one vacuum booster. Two screw rotors inside the cylinder of the screw vacuum pump rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen. The COBRA DS 5161/9161 A use a high-performance vacuum booster to optimize the system performance.

Kresba
COBRA DS 5161/9161 A
COBRA DS 5161/9161 A
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
Technická data COBRA DS 5161 A COBRA DS 9161 A
Jmenovitá čerpací rychlost 4300 m³/h 6160 m³/h
Koncový tlak 0,001 (1·10-3) hPa (mbar) 0,001 (1·10-3) hPa (mbar)
Jmenovitý výkon motoru vakuového posilovače 15 kW 20 kW
Jmenovitý výkon motoru základové pumpy 15 kW 15 kW
Spotřeba energie při koncovém tlaku / chod naprázdno 12,5 kW 13 kW
Jmenovité otáčky motoru základové pumpy 3600 min-1 3600 min-1
Jmenovité otáčky motoru vakuového posilovače 3600 min-1 3600 min-1
Hladina hluku (ISO 2151) < 75 dB(A) < 75 dB(A)
Spotřeba vody min, 10 l/min min, 11 l/min
Spotřeba dusíku 0 – 200 l/min 0 – 200 l/min
Přibližná hmotnost 1440 kg 1800 kg
Rozměry (L x W x H) 1550 x 723 x 1504 mm 1572 x 810 x 1860 mm
Přívod / výstup plynu DN 250 / DN 63 DN 200 / DN 63

Ke stažení

COBRA DS 5161 / 9161 A

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