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Canada
  • Busch Vacuum Solutions PUMA WY 3600 A

PUMA WY 3600 A

Vacuum booster

The leak-tight Performance Optimizers for Medium and High Vacuum Applications

Reliable

Special lobe design to prevent powder and particle deposits, robust construction made of GGG40 material, leak-tight

High performance

Specially designed for harsh applications in the medium and high vacuum range, including semiconductor processes with powder and dust, excellent volumetric efficiency

Flexible

Reliable performance under varying operating conditions, boosts the performance of all types of backing pumps

Technical specifications

Markets & applications

Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
Semiconductor production
  • Harsh
Solar power industry
  • Plasma-enhanced chemical vapor deposition (PECVD)