Leak-Tight Vacuum Generation for Demanding Processes
High performance
Advanced screw design, patented self-balancing screws, perfectly suited for coating applications, helium pumping or fluorination
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient water cooling
Leak-tight design
Integrated motor, no contamination of process gases, gas-tight
Technical specifications
Markets & applications
Analytics and Research and Development
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Beamline
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Coating
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Particle accelerators
Metallurgy
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Coating
Solar power industry
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Plasma-enhanced chemical vapor deposition (PECVD)
Design options
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ATEX - for use in explosion hazard areas.