Turbomolecular
Vacuum Pumps

Principle of Operation

Turbomolecular vacuum pumps operate with the principle of a turbine blade. The rapidly rotating rotor blades impart momentum to the gas molecules and their initially random movement is changed to a controlled flow within the pump body. The pumping process of the turbomolecular vacuum pumps moves the gas molecules through the pump from the low pressure inlet flange to the high pressure exhaust port. To create this momentum in the gas molecules, the tips of the rotor blades have to move at high speed.

Products using this technology:

Turbo

Turbomolecular Vacuum Pumps

Principle of Operation

Turbomolecular vacuum pumps operate with the principle of a turbine blade. The rapidly rotating rotor blades impart momentum to the gas molecules and their initially random movement is changed to a controlled flow within the pump body. The pumping process of the turbomolecular vacuum pumps moves the gas molecules through the pump from the low pressure inlet flange to the high pressure exhaust port. To create this momentum in the gas molecules, the tips of the rotor blades have to move at high speed (> 30.000 min-1).

The compact rotor design is best in class with the highest performance and throughput combined with a small footprint. The integrated molecular drag technology allows higher foreline pressures resulting in high system efficiency and requiring smaller backing pumps. The series of turbomolecular vacuum pumps use permanently lubricated ceramic ball bearings with a mean time to failure (MTTF) well exceeding 200.000 operating hours.

 

Products using this technology:

Turbo


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