During the SEMICON West trade show, Dr. Paul Alers, Business Development and Product Manager Semicon (part of the Busch group of companies), talked to Solid State Technology online magazine about the demands in the semiconductor sector for reliable, proven fab technology coupled with energy savings.
In the interview with Solid State Technology, Dr. Paul Alers explained the philosophy behind the new Premium Efficiency class of vacuum pumps from Busch for semiconductor fabs. Busch has kept the proven twin-screw technology of the COBRA BC to meet the demand for a low-risk solution in fabs, Alers said, while reducing significantly the amount of energy consumed. The Premium Efficiency class of vacuum pumps from Busch is gradually being introduced across all product series.
SEMICON West trade show is the flagship event for the global microelectronics industry and showcases technologies in the areas of semiconductors, photovoltaics and solar units and installations, micro-electromechanical systems (MEMs), LED and solid state lighting, and printed and flexible electronics.
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